Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825657 | Plasma processing apparatus | Masakazu Isozaki, Masahito Mori | 2020-11-03 |
| 10825664 | Wafer processing method and wafer processing apparatus | Tomoyuki Watanabe, Yutaka Kouzuma, Takumi Tandou, Hiroshi Ito | 2020-11-03 |
| 10811231 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Masaru Izawa | 2020-10-20 |
| 10804080 | Plasma processing apparatus and plasma processing method | Tooru Aramaki | 2020-10-13 |
| 10741368 | Plasma processing apparatus | Takumi Tandou, Takamasa Ichino | 2020-08-11 |
| D891636 | Ring for a plasma processing apparatus | Masakazu Isozaki, Masahito Mori, Takao Arase, Taku Iwase | 2020-07-28 |