Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825664 | Wafer processing method and wafer processing apparatus | Tomoyuki Watanabe, Yutaka Kouzuma, Kenetsu Yokogawa, Hiroshi Ito | 2020-11-03 |
| 10741368 | Plasma processing apparatus | Takamasa Ichino, Kenetsu Yokogawa | 2020-08-11 |