Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763088 | Vacuum processing apparatus | Takashi Uemura, Kazunori Nakamoto, Kohei Sato | 2020-09-01 |
| 10741368 | Plasma processing apparatus | Takumi Tandou, Kenetsu Yokogawa | 2020-08-11 |
| 10692784 | Vacuum processing apparatus | Kohei Sato | 2020-06-23 |