Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796890 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Yutaka Ohmoto, Koji Nagai | 2020-10-06 |
| 10763088 | Vacuum processing apparatus | Takashi Uemura, Takamasa Ichino, Kohei Sato | 2020-09-01 |