Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796890 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Kazunori Nakamoto, Koji Nagai | 2020-10-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796890 | Plasma processing apparatus and sample stage thereof | Hironori Kusumoto, Kazunori Nakamoto, Koji Nagai | 2020-10-06 |