Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811231 | Plasma processing apparatus and plasma processing method | Kenetsu Yokogawa, Masaru Izawa | 2020-10-20 |
| 10804080 | Plasma processing apparatus and plasma processing method | Kenetsu Yokogawa | 2020-10-13 |