Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D901407 | Integrated type ion shield for semiconductor manufacturing apparatus | Yutaka Kouzuma, Michiaki Kobayashi, Nobuya Miyoshi, Kohei Kawamura, Hiroyuki Kobayashi | 2020-11-10 |
| D900760 | Ion shield plate for semiconductor manufacturing apparatus | Yutaka Kouzuma, Michiaki Kobayashi, Kohei Kawamura, Nobuya Miyoshi, Hiroyuki Kobayashi | 2020-11-03 |