Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879033 | Stage apparatus, and charged particle beam apparatus | Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe +2 more | 2020-12-29 |
| 10804067 | Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage | Takanori Kato, Motohiro TAKAHASHI, Naruo Watanabe, Akira Nishioka, Masaki Mizuochi +1 more | 2020-10-13 |
| 10770259 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Takanori Kato | 2020-09-08 |
| 10658151 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe +2 more | 2020-05-19 |
| 10600614 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe +1 more | 2020-03-24 |
| 10591018 | Vibration-suppressing mechanism to be attached to charged particle beam device, and charged particle beam device | Hiroki Takahashi, Shuichi Nakagawa, Toshihiko Shimizu, Toshihiro Arisaka | 2020-03-17 |
| 10586676 | Charged particle beam device | Takanori Kato, Motohiro TAKAHASHI, Shuichi Nakagawa | 2020-03-10 |