Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879033 | Stage apparatus, and charged particle beam apparatus | Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa +2 more | 2020-12-29 |
| 10804067 | Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage | Takanori Kato, Motohiro TAKAHASHI, Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa +1 more | 2020-10-13 |
| 10658151 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Akira Nishioka +2 more | 2020-05-19 |
| 10600614 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa +1 more | 2020-03-24 |