Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879033 | Stage apparatus, and charged particle beam apparatus | Akira Nishioka, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa, Naruo Watanabe +2 more | 2020-12-29 |
| 10840059 | Charged particle radiation device | Kentaro SHIGEOKA, Takanori Kato, Kazuhiro Morita, Motohiro TAKAHASHI, Shuichi Nakagawa +1 more | 2020-11-17 |
| 10804067 | Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage | Takanori Kato, Motohiro TAKAHASHI, Naruo Watanabe, Akira Nishioka, Shuichi Nakagawa +1 more | 2020-10-13 |
| 10770259 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Shuichi Nakagawa, Hironori Ogawa, Takanori Kato | 2020-09-08 |
| 10658151 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe, Akira Nishioka +2 more | 2020-05-19 |
| 10600614 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa, Naruo Watanabe +1 more | 2020-03-24 |