TS

Tomotaka SHIBAZAKI

HH Hitachi High-Technologies: 3 patents #41 of 200Top 25%
Overall (2020): #65,348 of 565,922Top 15%
3
Patents 2020

Issued Patents 2020

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10879033 Stage apparatus, and charged particle beam apparatus Akira Nishioka, Masaki Mizuochi, Shuichi Nakagawa, Hironori Ogawa, Naruo Watanabe +2 more 2020-12-29
10658151 Stage device and charged particle beam device Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Naruo Watanabe, Akira Nishioka +2 more 2020-05-19
10600614 Stage device and charged particle beam device Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Hironori Ogawa, Naruo Watanabe +1 more 2020-03-24