Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879033 | Stage apparatus, and charged particle beam apparatus | Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Hironori Ogawa, Naruo Watanabe +2 more | 2020-12-29 |
| 10804067 | Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage | Takanori Kato, Motohiro TAKAHASHI, Naruo Watanabe, Masaki Mizuochi, Shuichi Nakagawa +1 more | 2020-10-13 |
| 10671057 | Management system | — | 2020-06-02 |
| 10658151 | Stage device and charged particle beam device | Motohiro TAKAHASHI, Masaki Mizuochi, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Naruo Watanabe +2 more | 2020-05-19 |
| 10627256 | Rotation angle detecting device | — | 2020-04-21 |
| 10527467 | Rotation angle detector which can detect entry of foreign substances | Shunichi Odaka, Keisuke Imai | 2020-01-07 |