Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10591018 | Vibration-suppressing mechanism to be attached to charged particle beam device, and charged particle beam device | Hiroki Takahashi, Shuichi Nakagawa, Toshihiko Shimizu, Hironori Ogawa | 2020-03-17 |