Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840118 | Substrate processing apparatus and method for assembling tube assembly | Cha-young Yoo, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim, Bong Ju Jung +3 more | 2020-11-17 |
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Chang Dol KIM +2 more | 2020-10-06 |
| 10741396 | Substrate processing apparatus | Woo Duck JUNG, Kyu Jin Choi, Seong Min HAN | 2020-08-11 |
| 10622228 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Il-Kwang Yang | 2020-04-14 |
| 10593545 | Method for substrate processing using exhaust ports | Il-Kwang Yang, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2020-03-17 |