Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796915 | Method for forming epitaxial layer at low temperature | Doo Yeol RYU, Seung Woo Shin, Cha-young Yoo, Ho Min CHOI, Wan Suk Oh +3 more | 2020-10-06 |
| 10741396 | Substrate processing apparatus | Sung Tae Je, Kyu Jin Choi, Seong Min HAN | 2020-08-11 |