Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Chang Dol KIM +2 more | 2020-10-06 |
| 10593545 | Method for substrate processing using exhaust ports | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Yang-Sik Shin | 2020-03-17 |