Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622228 | Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit | Dong Keun Lee, Kyung-Jin Chu, Sung Tae Je | 2020-04-14 |
| 10593545 | Method for substrate processing using exhaust ports | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Yang-Sik Shin | 2020-03-17 |