Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840118 | Substrate processing apparatus and method for assembling tube assembly | Cha-young Yoo, Sung Tae Je, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim +3 more | 2020-11-17 |
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Jun Jin Hyon, Sung Tae Je, Byoung-Gyu Song, Kyong-Hun Kim, Chang Dol KIM +2 more | 2020-10-06 |
| 10784184 | Semiconductor device including through silicon vias distributing current | Soojung Rho, Chisung Oh, Kyomin Sohn, Jong-ho Moon, SeungHan Woo +1 more | 2020-09-22 |
| 10661542 | Method for transferring graphene | — | 2020-05-26 |
| 10593545 | Method for substrate processing using exhaust ports | Il-Kwang Yang, Sung Tae Je, Byoung-Gyu Song, Kyong-Hun Kim, Yang-Sik Shin | 2020-03-17 |