Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793949 | Substrate processing apparatus and substrate processing method using the same | Sung Tae Je, Byoung-Gyu Song, Yong-Ki Kim, Kyong-Hun Kim, Chang Dol KIM +2 more | 2020-10-06 |