Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515820 | Process and apparatus for processing a nitride structure without silica deposition | Derek Bassett, Antonio Luis Pacheco Rotondaro, Teruomi Minami, Takahiro Furukawa | 2019-12-24 |
| 10490399 | Systems and methodologies for vapor phase hydroxyl radical processing of substrates | Ian J. Brown | 2019-11-26 |
| 10429745 | Photo-sensitized chemically amplified resist (PS-CAR) simulation | Michael A. Carcasi, Benjamen M. Rathsack, Mark H. Somervell, Seiji Nagahara, Seiichi Tagawa | 2019-10-01 |
| 10325779 | Colloidal silica growth inhibitor and associated method and system | Antonio Rotondaro | 2019-06-18 |
| 10262880 | Cover plate for wind mark control in spin coating process | Derek Bassett, Joshua Hooge, Katsunori Ichino, Yuichi Terashita, Kousuke Yoshihara | 2019-04-16 |
| 10256163 | Method of treating a microelectronic substrate using dilute TMAH | Shuhei Takahashi, Naoyuki Okamura, Masami Yamashita, Derek Bassett, Antonio Luis Pacheco Rotondaro | 2019-04-09 |