Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Suguru Enokida +2 more | 2019-12-10 |
| 10289004 | Developing apparatus, developing method and storage medium | Hideharu Kyouda, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2019-05-14 |
| 10268116 | Processing liquid supplying apparatus and method of supplying processing liquid | Koji Takayanagi, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2019-04-23 |
| 10262880 | Cover plate for wind mark control in spin coating process | Derek Bassett, Wallace P. Printz, Joshua Hooge, Katsunori Ichino, Yuichi Terashita | 2019-04-16 |