Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10493387 | Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method | Yuichi Yoshida, Ryouichirou Naitou, Arnaud Alain Jean DAUENDORFFER, Shinobu Miyazaki | 2019-12-03 |
| 10396549 | Semiconductor device | Masashi Arakawa, Tadashi Fukui | 2019-08-27 |
| 10268116 | Processing liquid supplying apparatus and method of supplying processing liquid | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Daisuke Ishimaru | 2019-04-23 |
| 10256122 | Substrate heating method | Masato Mizuta | 2019-04-09 |
| 10236868 | Semiconductor device | — | 2019-03-19 |