TS

Takashi Sasa

TL Tokyo Electron Limited: 3 patents #40 of 763Top 6%
Overall (2019): #66,434 of 560,194Top 15%
3
Patents 2019

Issued Patents 2019

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10518199 Treatment solution supply apparatus Daisuke Ishimaru, Katsuya Hashimoto, Hideo Shite, Shinya Wakamizu, Kazuhiko Kimura 2019-12-31
10400760 Liquid delivery method, liquid delivery system, and computer-readable storage medium Katsuya Hashimoto, Daiki Shibata, Takeshi Ohto 2019-09-03
10268116 Processing liquid supplying apparatus and method of supplying processing liquid Kousuke Yoshihara, Koji Takayanagi, Toshinobu Furusho, Daisuke Ishimaru 2019-04-23