Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328546 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Kenji Yada, Masashi Enomoto, Noboru Nakashima | 2019-06-25 |
| 10289004 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Yasushi Takiguchi | 2019-05-14 |