Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520831 | Substrate processing method, substrate processing system and substrate processing apparatus | Yoshihiro Kondo | 2019-12-31 |
| 10328546 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Kenji Yada, Noboru Nakashima | 2019-06-25 |