Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10328546 | Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method | Akihiro Kubo, Masahiro Fukuda, Taro Yamamoto, Kenji Yada, Masashi Enomoto | 2019-06-25 |