YT

Yasushi Takiguchi

TL Tokyo Electron Limited: 2 patents #91 of 763Top 15%
Overall (2019): #105,021 of 560,194Top 20%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10289004 Developing apparatus, developing method and storage medium Kousuke Yoshihara, Hideharu Kyouda, Koshi MUTA, Taro Yamamoto 2019-05-14
10168618 Liquid processing method and storage medium Norihiko Sasagawa, Hiroichi Inada 2019-01-01