Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490399 | Systems and methodologies for vapor phase hydroxyl radical processing of substrates | Wallace P. Printz | 2019-11-26 |
| 10490402 | UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly | Mark H. Somervell, Ihsan Simms, Ainhoa Romo Negreira, Kathleen Nafus | 2019-11-26 |
| 10347503 | Method and hardware for enhanced removal of post etch polymer and hardmask removal | Junjun Liu | 2019-07-09 |
| 10249509 | Substrate cleaning method and system using atmospheric pressure atomic oxygen | — | 2019-04-02 |