KN

Kathleen Nafus

TL Tokyo Electron Limited: 2 patents #91 of 763Top 15%
Overall (2019): #152,791 of 560,194Top 30%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10490402 UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly Mark H. Somervell, Ian J. Brown, Ihsan Simms, Ainhoa Romo Negreira 2019-11-26
10438806 Methods and system of using organosilicates as patterning films Serge Biesemans 2019-10-08