Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490402 | UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly | Ian J. Brown, Ihsan Simms, Ainhoa Romo Negreira, Kathleen Nafus | 2019-11-26 |
| 10429745 | Photo-sensitized chemically amplified resist (PS-CAR) simulation | Michael A. Carcasi, Benjamen M. Rathsack, Wallace P. Printz, Seiji Nagahara, Seiichi Tagawa | 2019-10-01 |
| 10170354 | Subtractive methods for creating dielectric isolation structures within open features | Benjamen M. Rathsack | 2019-01-01 |