Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522428 | Critical dimension control by use of a photo agent | Anton J. deVilliers | 2019-12-31 |
| 10429745 | Photo-sensitized chemically amplified resist (PS-CAR) simulation | Benjamen M. Rathsack, Mark H. Somervell, Wallace P. Printz, Seiji Nagahara, Seiichi Tagawa | 2019-10-01 |