TM

Teruomi Minami

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
Overall (2019): #248,504 of 560,194Top 45%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10515820 Process and apparatus for processing a nitride structure without silica deposition Derek Bassett, Wallace P. Printz, Antonio Luis Pacheco Rotondaro, Takahiro Furukawa 2019-12-24