Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10272478 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Itaru Kanno, Kenji Mochida +1 more | 2019-04-30 |
| 10256163 | Method of treating a microelectronic substrate using dilute TMAH | Wallace P. Printz, Shuhei Takahashi, Naoyuki Okamura, Derek Bassett, Antonio Luis Pacheco Rotondaro | 2019-04-09 |