Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10272478 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Masami Yamashita, Itaru Kanno, Kenji Mochida +1 more | 2019-04-30 |
| 10192758 | Substrate processing apparatus | Yosuke Kawabuchi, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi, Kazuyoshi Shinohara +1 more | 2019-01-29 |