Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475638 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium having stored thereon substrate processing program | Yuki Yoshida | 2019-11-12 |
| 10192758 | Substrate processing apparatus | Yosuke Kawabuchi, Hisashi Kawano, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi +1 more | 2019-01-29 |