Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10272478 | Substrate processing system, substrate cleaning method, and recording medium | Meitoku Aibara, Yuki Yoshida, Hisashi Kawano, Masami Yamashita, Kenji Mochida +1 more | 2019-04-30 |
| 10242889 | Substrate liquid processing method and substrate liquid processing apparatus | Jun Nonaka | 2019-03-26 |