Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460961 | Substrate processing apparatus | Konosuke Hayashi | 2019-10-29 |
| 10406566 | Substrate processing device and substrate processing method | Jun Matsushita, Konosuke Hayashi, Kunihiro Miyazaki | 2019-09-10 |
| 10325787 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Akinori Iso | 2019-06-18 |
| 10281210 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Konosuke Hayashi, Takashi Ootagaki | 2019-05-07 |
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Takashi Ootagaki, Atsushi Kinase, Masahiro Abe | 2019-04-30 |