Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460961 | Substrate processing apparatus | Yuji Nagashima | 2019-10-29 |
| 10406566 | Substrate processing device and substrate processing method | Jun Matsushita, Yuji Nagashima, Kunihiro Miyazaki | 2019-09-10 |
| 10325787 | Substrate processing apparatus and substrate processing method | Takashi Ootagaki, Yuji Nagashima, Akinori Iso | 2019-06-18 |
| 10281210 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Takashi Ootagaki, Yuji Nagashima | 2019-05-07 |
| 10276406 | Substrate processing device and substrate processing method | Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2019-04-30 |