Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483151 | Substrate transfer apparatus, substrate processing apparatus, and substrate processing method | — | 2019-11-19 |
| 10319602 | Substrate treatment method and substrate treatment apparatus | Nobuo Kobayashi, Koichi Hamada, Yoshiaki Kurokawa, Hideki Mori, Yasushi Watanabe +1 more | 2019-06-11 |
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2019-04-30 |