Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Masahiro Abe | 2019-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Takashi Ootagaki, Yuji Nagashima, Masahiro Abe | 2019-04-30 |