Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325787 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Yuji Nagashima, Akinori Iso | 2019-06-18 |
| 10281210 | Substrate processing apparatus and substrate processing method | Kunihiro Miyazaki, Konosuke Hayashi, Yuji Nagashima | 2019-05-07 |
| 10276406 | Substrate processing device and substrate processing method | Konosuke Hayashi, Masaaki Furuya, Yuji Nagashima, Atsushi Kinase, Masahiro Abe | 2019-04-30 |