Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10421622 | Floating conveyor and substrate processing apparatus | Yuichi IMAOKA | 2019-09-24 |
| 10325787 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima | 2019-06-18 |