Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10406566 | Substrate processing device and substrate processing method | Jun Matsushita, Yuji Nagashima, Konosuke Hayashi | 2019-09-10 |
| 10281210 | Substrate processing apparatus and substrate processing method | Konosuke Hayashi, Takashi Ootagaki, Yuji Nagashima | 2019-05-07 |