Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365231 | Optical phase measurement method and system | Dror Shafir, Yanir Hainick, Shahar Gov | 2019-07-30 |
| 10365163 | Optical critical dimension metrology | Dror Shafir, Danny Grossman | 2019-07-30 |
| 10359369 | Metrology test structure design and measurement scheme for measuring in patterned structures | Oded Cohen | 2019-07-23 |
| 10311198 | Overlay design optimization | Tal Verdene, Michal Haim YACHINI, Dror Shafir, Changman Moon, Shay Wolfling | 2019-06-04 |
| 10274435 | Method and system for optical metrology in patterned structures | Boris Levant, Yanir Hainick, Vladimir Machavariani, Roy Koret | 2019-04-30 |
| 10216098 | Test structure for use in metrology measurements of patterns | Oded Cohen, Igor Turovets | 2019-02-26 |
| 10209206 | Method and system for determining strain distribution in a sample | Shay Wolfling, Cornel Bozdog, Matthew Sendelbach | 2019-02-19 |