Günes NAKIBOGLU

Issued Patents 2019

Showing 1–5 of 5 patents

Patent #	Title	Co-Inventors	Date
10495985	Lithographic apparatus and device manufacturing method	Jan Steven Christiaan Westerlaken, Frank Johannes Jacobus Van Boxtel, Maria del Carmen MERCADO CARMONA, Thibault Simon Mathieu Laurent	2019-12-03
10345717	Lithographic apparatus and method	Suzanne Johanna Antonetta Geertruda Cosijns, Anne Willemijn Bertine Quist, Lukasz Sosniak, Frank Johannes Jacobus Van Boxtel, Engelbertus Antonius Fransiscus Van Der Pasch	2019-07-09
10317804	Substrate table, lithographic apparatus and method of operating a lithographic apparatus	Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman +6 more	2019-06-11
10241422	Lithography apparatus and a method of manufacturing a device	—	2019-03-26
10222713	Patterning device cooling apparatus	Laurentius Johannes Adrianus Van Bokhoven, Ruud Hendrikus Martinus Johannes Bloks, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen	2019-03-05