Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10317804 | Substrate table, lithographic apparatus and method of operating a lithographic apparatus | Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Günes NAKIBOGLU +6 more | 2019-06-11 |
| 10216100 | Inspection substrate and an inspection method | Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more | 2019-02-26 |