Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416571 | Fluid handling structure and lithographic apparatus | Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more | 2019-09-17 |
| 10261422 | Lithography apparatus and method of manufacturing a device | Norbertus Josephus Martinus Van Den Nieuwelaar, Victor Manuel Blanco Carballo, Casper Roderik De Groot, Rolf Hendrikus Jacobus Custers, David M. Phillips +7 more | 2019-04-16 |
| 10216100 | Inspection substrate and an inspection method | Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Floor Lodewijk Keukens +8 more | 2019-02-26 |