Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416571 | Fluid handling structure and lithographic apparatus | Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more | 2019-09-17 |
| 10317804 | Substrate table, lithographic apparatus and method of operating a lithographic apparatus | Daan Daniel Johannes Antonius Van Sommeren, Coen Hubertus Matheus Baltis, Harold Sebastiaan Buddenberg, Giovanni Luca Gattobigio, Günes NAKIBOGLU +6 more | 2019-06-11 |