Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10499485 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent | 2019-12-03 |
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Peter Michael Baumgart +4 more | 2019-11-19 |
| 10455680 | Method and apparatus for purifying target material for EUV light source | Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2019-10-22 |