Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10455680 | Method and apparatus for purifying target material for EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2019-10-22 |
| 10426020 | Droplet generator steering system | Peter Michael Baumgart, John M. Algots, Abhiram Govindaraju | 2019-09-24 |